Air-gap amorphous silicon thin film transistors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121914
Reference4 articles.
1. Surface micromachining for microsensors and microactuators
2. Surface micromachining technology applied to the fabrication of a FET pressure sensor
3. Silicon microstructuring technology
4. Thin films for micromechanical sensors
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