Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications-Reference-Cited by-同舟云学术

Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications

Published:2015-05 Issue: Volume:226 Page:149-153
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sviličić Boris,Mastropaolo Enrico,Cheung Rebecca

Funder

Croatian Science Foundation (scientific project HRZZ-O-1459-2009)

University of Rijeka

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference26 articles.

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2. Tuning in to RF MEMS;Rebeiz;IEEE Microw. Mag.,2009

3. High-Q tunable filters: challenges and potential;Mansour;IEEE Microw. Mag.,2014

4. A review of MEMS oscillators for frequency reference and timing applications;van Beek;J. Micromech. Microeng.,2012

5. MEMS technology for timing and frequency control;Nguyen;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2007

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