Author:
Li Biao,Tang Xiaosong,Xie Huimin,Zhang Xin
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. B. Li, X. Tang, H. Xie, X. Zhang, Focused ion beam (FIB) nanomachining and FIB moire technique for strain analysis in MEMS/NEMS structures and devices, in: Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’03), Kyoto, Japan, 2003, p. 674.
2. W.N. Sharpe, B. Yuan, R. Vaidyanathan, Measurement of Young’s modulus, Poisson’s ration, and tensile strength of polysilicon, in: Proceedings of the 10th IEEE International Workshop on Microelectromechanical Systems (MEMS’97), Nagoya, Japan, 1997, p. 424.
3. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon;Guckel;J. Appl. Phys.,1671
4. H. Guckel, D.W. Burns, H.A.C. Tilmans, D.W. DeRoo, C.R. Rutigliano, Mechanical properties of fine grained polysilicon—the repeatability issue, in: Proceedings of the IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1988, p. 96.
5. Novel microstructure for the in situ measurement of mechanical properties of thin films;Mehregany;J. Appl. Phys.,1987
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献