Wavelength-meter controlled cavity ring-down spectroscopy: high-sensitivity detection of trace moisture in N 2 at sub-ppb levels-Reference-Cited by-同舟云学术

Wavelength-meter controlled cavity ring-down spectroscopy: high-sensitivity detection of trace moisture in N 2 at sub-ppb levels

Published:2016-04 Issue: Volume:241 Page:152-160
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hashiguchi Koji,Lisak Daniel,Cygan Agata,Ciuryło Roman,Abe Hisashi

Funder

JSPS KAKENHI

FY20l3 JSPS Invitation Fellowship Program for Research in Japan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference43 articles.

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2. International Technology Roadmap for Semiconductors (2013), http://www.itrs2.net/.

3. Development of humidity standard in trace-moisture region: characteristics of humidity generation of diffusion tube humidity generator;Abe;Sens. Actuators A,2006

4. Improvement of flow and pressure controls in diffusion-tube humidity generator: Performance evaluation trace-moisture generation using cavity ring-down spectroscopy;Abe;Sens. Actuators A,2007

5. Uncertainty analysis of evaporation rate in magnetic suspension balance/diffusion-tube humidity generator;Abe;Int. J. Thermophys.,2008

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