Author:
Abe Hisashi,Kitano Hiroshi
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. International Technology Roadmap for Semiconductors, 2004.
2. Techniques for the measurement of trace-moisture in high-purity electronic specialty gases;Funke;Rev. Sci. Instrum.,2003
3. Transport Phenomena;Bird,2002
4. A review of the molecular diffusivities of H2O, CO2, CH4, CO, O3, SO2, NH3, N2O, NO, and NO2 in air, O2 and N2 near STP;Massman;Atmos. Environ.,1998
5. Important new values of the physical constants of 1986, vapor pressure formulations based on the ITS-90, and psychrometer formulae;Sonntag;Z. Meteorol.,1990
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