Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators-Reference-Cited by-同舟云学术

Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Published:2007-03 Issue:2 Volume:134 Page:582-593
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hao Zhili,Ayazi Farrokh

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support;Wang;Proc. MEMS,2004

2. 1.14 GHz self-aligned vibrating micromechanical disk resonator;Wang,2003

3. High-Q VHF micromechanical disk resonators;Clark,2000

4. UHF High-Order Radial-Contour-Mode Disk Resonators;Clark,2003

5. An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations;Hao;Sens. Actuators A,2003

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