Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators-Reference-Cited by-同舟云学术

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Effect of Undercut due to Isotropic Etch while Releasing on the Performance of TPoS Resonators

Published:2023-04-17 Issue: Volume: Page:
ISSN:
Container-title:2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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Author:

Bijay J¹,Bhadri Narayanan K N¹,Sarkar Abhijit¹,DasGupta Amitava¹,Nair Deleep R¹

Affiliation:

1. Indian Institute of Technology Madras,Chennai,India,600036

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10100701/10100725/10100769.pdf?arnumber=10100769

Reference21 articles.

1. Thin film resonator technology

2. Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

3. Effect of polarization voltage on the measured quality factor of a multiple-beam tuning-fork gyroscope

4. 1D and 2D wide acoustic bandgap Phononic Crystal structures for performance improvement of AlN-on-Si resonators operating in GHz range

5. Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q

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