An analytical model for pull-in voltage of clamped–clamped multilayer beams-Reference-Cited by-同舟云学术

An analytical model for pull-in voltage of clamped–clamped multilayer beams

Published:2004-10 Issue:1 Volume:116 Page:15-21
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Rong Hua,Huang Qing-An,Nie Meng,Li Weihua

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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4. M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures;Osterberg;J. Microelectromech. Syst.,1997

5. R.K. Gupta, Electrostatic pull-in test structure design for in-situ mechanical property measurement of microelectromechanical systems (MEMS), Ph.D. dissertation, MIT, Cambridge, MA, 1997, pp. 10–27.

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