Dynamic Analysis of the Micro-Cantilever with Linear Width Variation under Electrostatic Actuation

Author:

Bhojani Sonal J.1,Trivedi Reena2,Sharma Dharmendra S.1

Affiliation:

1. The Maharaja Sayajirao University of Baroda

2. Nirma University

Abstract

The dynamics of the micro-cantilever with linearly varying width under electrostatic actuation is presented. The restraining displacement and voltage dissociating the unstable and stable operating region are determined by Bubnov-Galerkin approach. The influence of the variation in geometry of micro-beam and change in material parameters on the pull-in conditions is investigated. The increase of 24.27% is obtained in pull-in displacement when the tip width is reduced to 0.

Publisher

Trans Tech Publications Ltd

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