Author:
Zou Quanbo,Li Zhijian,Liu Litian
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Effect of deposition condition on intrinsic stress in a Si:H films;Ozawa;J. Appl. Phys.,1983
2. Mechanical property measurement of composite rectangular membrane;Tabata;Sensor and Actuator,1989
3. Measurement of the mechanical properties of silicon microresonators;Zhang;Sensors and Actuators A,1991
4. Comparison of techniques for measuring both compressive and tensile stress in thin films;can Drieënhuizen;Sensors and Actuators A,1993
5. K. Najafi and K. Suzuki, A novel technique and structure for measurement of intrinsic stress and Young's modulus of thin films, Proc. IEEE Workshop Microelectromechanical Syst., Salt Lake City, UT, USA, 20–22 Feb., 1989, pp. 96–97
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