Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators

Author:

Piazza Gianluca,Abdolvand Reza,Ho Gavin K.,Ayazi Farrokh

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. S.Y. No, A. Hashimura, S. Poukamali, F. Ayazi, Single-crystal silicon HARPSS capacitive resonators with submicron gap-spacing, in: Proceedings of the Solid-State Sensors, Actuator and Microsystems Workshop, June, 2002, pp. 281–284.

2. J.R. Clark, W.-T. Hsu, C.T.-C. Nguyen, High-Q VHF micromechanical countour-mode disk resonators, in: Proceedings of the IEEE International Electron Devices Meeting, December 2000, pp. 493–496.

3. S.A. Bhave, et al., Poly-SiGe: A High-Q structural material for integrated RF MEMS, in: Proceedings of the Solid-State Sensors, Actuator and Microsystems Workshop, June 2002, pp. 34–37.

4. R.E. Mihailovic, N.C. MacDonald, Dissipation measurements of vacuum-operated single-crystal silicon microresonator, Sens. Actuators A 50 (1995) 199–207.

5. R. Ruby, et al., Ultra-miniature High-Q filters and duplexers using FBAR technology, in: Proceedings of the IEEE International Solid-State Circuits Conference, 2001, pp. 120–122.

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