Author:
Mihailovich R.E.,MacDonald N.C.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference35 articles.
1. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry;Blom;J. Vac. Sci. Technol. B,1992
2. Silicon pressure sensor integrates resonant strain gauge on diaphragm;Ikeda;Sensors and Actuators,1990
3. H. Guckel, C. Rypstat, M. Nesnidal, J.D. Zook, D.W. Burns and D.K. Arch, Polysilicon resonant microbeam technology for high performance sensor applications, IEEE Sensor and Actuator Workshop, Hilton Head, SC, USA, June 1992, pp. 202–207
4. D.K. Arch, personal communication
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