JMEMS Letters.1pt Highly Tunable Piezoelectric Resonators Using Al$_{0.7}$Sc$_{0.3}$N
Author:
Affiliation:
1. Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA
2. Akoustis Inc, Huntersville, NC, USA
Funder
Army/Army Research Laboratory (ARL) via the Collaborative for Hierarchical Agile and Responsive Materials
Defense Advanced Research Projects Agency (DARPA) via Small Business Innovation Research
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/4357932/10376468.pdf?arnumber=10376468
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1. Equivalent electrical circuits for electroacoustic MEMS design: a review;Journal of Micromechanics and Microengineering;2024-07-30
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