Interaction of SiHx precursors with hydrogen-covered Si surfaces: Impact dynamics and adsorption sites
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
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1. Silicon epitaxial growth on the Si(001)2×1 surface from silane using dynamic Monte Carlo simulations
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2. Selective deposition of a crystalline Si film by a chemical sputtering process in a high pressure hydrogen plasma;Journal of Applied Physics;2015-07-28
3. Modeling of Thin-Film Deposition Processes;Advanced Silicon Materials for Photovoltaic Applications;2012-06-13
4. Challenges of introducing quantitative elementary reactions in multiscale models of thin film deposition;physica status solidi (b);2010-06-18
5. An Investigation of the Gas Phase and Surface Chemistry Active During the PECVD of nc-Silicon: A Detailed Model of the Gas Phase and Surface Chemistry;ECS Transactions;2009-09-25
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