Photoresist-free fabrication process for a-Si:H thin film transistors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. A new patterning process concept for large-area transistor circuit fabrication without using an optical mask aligner
2. Electrophotographic patterning of thin-film silicon on glass foil
3. Via-Hole Addressed TFT and Process for Large-Area A-Si:H Electronics
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