Author:
Lausecker R.,Bollgruen P.,Gleißner U.,Wallrabe U.
Subject
Industrial and Manufacturing Engineering,Strategy and Management,General Environmental Science,Renewable Energy, Sustainability and the Environment
Reference32 articles.
1. Soft lithography: masters on demand;Abdelgawad;Lab a Chip,2008
2. Wafer-level shellac-based interconnection process for ultrathin silicon chips of arbitrary shape;Barz,2016
3. Deconstructing energy use in microelectronics manufacturing: an experimental case study of a MEMS fabrication facility;Branham;Environ. Sci. Technol.,2010
4. Brown, J. C., 1966. US Patent No. 3,258,347: Edible pharmaceutical inks.
5. What is a green solvent? A comprehensive framework for the environmental assessment of solvents;Capello;Green Chem.,2007
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists;International Journal of Precision Engineering and Manufacturing-Green Technology;2021-09-03