Deconstructing Energy Use in Microelectronics Manufacturing: An Experimental Case Study of a MEMS Fabrication Facility-Reference-Cited by-同舟云学术

Deconstructing Energy Use in Microelectronics Manufacturing: An Experimental Case Study of a MEMS Fabrication Facility

Published:2010-04-22 Issue:11 Volume:44 Page:4295-4301
ISSN:0013-936X
Container-title:Environmental Science & Technology
language:en
Short-container-title:Environ. Sci. Technol.

Author:

Branham Matthew S.¹,Gutowski Timothy G.¹

Affiliation:

1. Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

Publisher

American Chemical Society (ACS)

Subject

Environmental Chemistry,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/es902388b

Reference20 articles.

1. Semiconductor Industry Association (SIA).http://www.sia-online.org/cs/papers_publications/press_release_detail?pressrelease.id=1534(accessed February 2, 2009).

2. Department of Energy, Energy Information Administration (DOE-EIA). 2002 Energy Consumption by Manufacturers. Data Tables. Table 1.1.http://www.eia.doe.gov/emeu/mecs/mecs2002/data02/pdf/table1.1_02.pdf.

3. The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices

4. Energy Intensity of Computer Manufacturing: Hybrid Assessment Combining Process and Economic Input−Output Methods

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