Interface modification of ultrathin SiO2/Si(001) by nitric oxide treatments: a comparative electron paramagnetic resonance and nuclear reaction analysis study

Author:

Cantin Jean-Louis,Jurgen von Bardeleben Hans,Georges Gosset Laurent,Ganem Jean-Jacques,Trimaille Isabelle

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Formation of modified Si/SiO2 interfaces with intrinsic low defect concentrations

2. Electron paramagnetic resonance spectra of interface defects in nitric oxide treated Si/SiO2

3. J.L. Cantin, H.J. von Bardeleben, in: D.A. Buchanan, A.H. Edwards, H.J. von Bardeleben, T. Huttori (Eds.), Proceedings of the MRS Fall Meeting 1999, Boston, MA, Vol. 592, Structure and Properties of Ultrathin Dielectric Films on Silicon and Related Structures, p. 245

4. A. Stirling, A. Pasquarello, J.C. Charlier, R. Car in: H.Z. Massoud, I.J.R. Baumvol, M. Hirose, E.H. Poindexter (Eds.), Proc. Vol. 2000-2, The Electrochemical Society, 2000, p. 283

5. Interface traps andPbcenters in oxidized (100) silicon wafers

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