Studies on the spin coating process of silica films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Preparation Of Low-Density Xerogels At Ambient Pressure For Low K Dielectrics
2. Effect of sol rheology on the uniformity of spin-on silica xerogel films
3. Spin coating of non-Newtonian fluids
4. Application of SiO2 aerogel film with low dielectric constant to intermetal dielectrics
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