Effect of sol rheology on the uniformity of spin-on silica xerogel films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371605
Reference37 articles.
1. Surface modified spin-on xerogel films as interlayer dielectrics
2. Spin coating of non-Newtonian fluids
3. On the Flow of a Non‐Newtonian Liquid on a Rotating Disk
4. Rheological properties of silica sol-gel materials
5. Preparation Of Low-Density Xerogels At Ambient Pressure For Low K Dielectrics
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