Grazing-angle incidence X-ray diffraction by Si1−α(x)Geα(x) thin layer if the composition coefficient α(x) is varying harmonically along the flat entrance surface

Author:

Bezirganyan P.A.,Bezirganyan A.P.,Bezirganyan S.E.,Bezirganyan H.A.,Hovnanyan K.O.

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference29 articles.

1. P.A. Bezirganyan Jr., A.P. Bezirganyan, S.E. Bezirganyan, K.O. Hovnanyan, Grazing-angle incidence X-ray diffraction curves of Si1−xGex thin layer if the composition coefficient (x) is varying harmonically along the flat layer surface, the Book of Abstracts of Sixteenth International Conference on X-ray Optics and Microanalysis (ICXOM XVI), Vienna, Austria, 2001, 57

2. Si/SiGe epitaxial base transistors: Part I material, physics and circuits; Part II process integration and analogue applications;Harame;IEEE Trans. Electron Devices,1995

3. SiGe HBT technology: a new contender for Si-based RF and microwave circuit applications;Cressler;IEEE Trans. Microwave Theory Technol.,1998

4. High mobility Si and Ge structures;Schaffler;Semicond. Sci. Technol.,1997

5. Silicon–germanium strained layer materials in microelectronics;Paul;Adv. Mater.,1999

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