Author:
Sałbut Leszek,Kujawińska Małgorzata
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Pryputniewicz RJ, Grabbe DG. Developments in micromechanics through analysis and experimentation. Proceedings of the 11th International Invitational ACEM Symposium, SEM, Bethel, 1993. p. 506–32.
2. Micromeasurements;Kujawińska;Proc SPIE,1996
3. Combined measurement of silicon microbeams by grating interferometry and digital holography;Jüptner;Proc SPIE,1998
4. Selection of interferometric methods for silicon microelements testing;Górski;Proc SPIE,1999
5. Novel aspects of interferometric testing of silicon microelements properties;Sałbut;Proc SPIE,2000
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