Comparison of beam-induced deposition using ion microprobe
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference23 articles.
1. Focused ion beam insulator deposition
2. Characterization and Application of Materials Grown by Electron-Beam-Induced Deposition
3. Nanometer-Scale Direct Carbon Mask Fabrication Using Electron-Beam-Assisted Deposition
4. New compound quantum dot materials produced by electron-beam induced deposition
5. Electron beam induced deposition from W(CO)6 at 2 to 20 keV and its applications
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4. Gas-assisted focused electron beam and ion beam processing and fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008
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