Affiliation:
1. Southwest University of Science and Technology
Abstract
Focused ion beam (FIB) is an important tool in microfabrication technique. In recent years, FIB was used to fabricate the nanodevices. In this paper, Pt nanowires with differ radius were deposited with FIB. The component and resistance of nanowires were investigated. Results indicate that the component of Pt naowires is mainly Pt, C and Ga. The high content of Pt in nanowires is 49.36%. The resistivity of Pt nanowire is from 545.74µΩ•cm to 5.16µΩ•cm. Pt nanowires with the diameter up to 60nm take on characteristic of metal; others take on that of semiconductor.
Publisher
Trans Tech Publications, Ltd.
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