Author:
Ochiai Yukinori,Watanabe Heiji,Fujita Jun-ichi,Baba Masakazu,Manako Shoko,Matsui Shinji
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Gas-assisted focused electron beam and ion beam processing and fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2008
2. Characterization of focused electron beam induced carbon deposits from organic precursors;Microelectronic Engineering;2005-03
3. Microprobe RBS analysis of localized processed areas by FIB etching and deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07
4. Comparison of beam-induced deposition using ion microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-01
5. Microprobe Analysis of Pt Films Deposited by Beam Induced Reaction;Japanese Journal of Applied Physics;1998-12-30