Preparation of hydrophobic diamond like carbon films by plasma source ion implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference13 articles.
1. Fluorohydrogenated amorphous carbon (a-C:H, F) films prepared by the r.f. plasma decomposition of 1,3-butadiene and carbon tetrafluoride
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4. Deposition of amorphous carbon layers from C2H2 and CF4 with an expanding thermal arc plasma beam set-up
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