Fluorohydrogenated amorphous carbon (a-C:H, F) films prepared by the r.f. plasma decomposition of 1,3-butadiene and carbon tetrafluoride
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes
2. Plasma Deposited Thin Films;Angus,1986
3. Amorphous carbon films as resist masks with high reactive ion etching resistance for nanometer lithography
4. Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection
5. Attainment of 0.13-μm lines and spaces by excimer-laser projection lithography in ‘‘diamond-like’’ carbon-resist
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1. Influence of structure evolution on tribological properties of fluorine-containing diamond-like carbon films: From fullerene-like to amorphous structures;Applied Surface Science;2018-11
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3. Wettability: Plasma Treatment Effects;Encyclopedia of Surface and Colloid Science, Third Edition;2015-12-04
4. Controlling the nanostructure and stability of a-C:H:N plasma polymers;Thin Solid Films;2015-04
5. Plasma Synthesis of Hydrocarbon/Fluorocarbon Thin Films with Compositional Gradients;Plasma Processes and Polymers;2013-06-17
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