Preservation of polytypic structure in implanted 4H-SiC(100)-Reference-Cited by-同舟云学术

Preservation of polytypic structure in implanted 4H-SiC(100)

Published:1999-01 Issue:1-4 Volume:148 Page:567-572
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Satoh M,Okamoto K,Nakaike Y,Kuriyama K,Kanaya M,Ohtani N

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. G.L. Harris (Ed.), Silicon Carbide, EMIS Datareviews series No.13, INSPEC, London, 1995

2. M. Kawamura, K. Higashi, H. Shirakura, M. Kitahara, T. Inada, Proceedings of 14th Symposium on Materials Science and Engineering, Hosei Univ. 1995, p. 151

3. J. Takahashi, M. Kanaya, Y. Fujikawa, J. Cryst. Growth 135 (1994) 61

4. J.F. Ziegler, J.P. Biersack, U. Littmark, in: J.F. Ziegler (Ed.), The Stopping and Range of Ions in Solids, vol. 1, Pergamon press, New York, 1985

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