Thermal stability of He irradiated photoresist films-Reference-Cited by-同舟云学术

Thermal stability of He irradiated photoresist films

Published:1999-01 Issue:1-4 Volume:148 Page:1111-1115
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Garcia Irene T.S,Zawislak F.C,Samios D

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference7 articles.

1. F.C. Zawislak, Irene T.S. Garcia, D. Samios, D.L. Baptista, P.F.P. Fichtner, E. Alves, Maria F. da Silva, J.C. Soares, to be published in Mat. Res. Soc. Symp

2. Improved surface properties of polymer materials by multiple ion beam treatment

3. Effects of sequential He+ and Ar+ implantation on surface properties of polymers

4. Influence of implantation of heavy metallic ions on the mechanical properties of two polymers, polystyrene and polyethylene terephthalate

5. A Monte Carlo computer program for the transport of energetic ions in amorphous targets

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