Mechanical properties of He irradiated and annealed AZ-1350 JTM films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Effects of sequential He+ and Ar+ implantation on surface properties of polymers
2. Influence of implantation of heavy metallic ions on the mechanical properties of two polymers, polystyrene and polyethylene terephthalate
3. Improved surface properties of polymer materials by multiple ion beam treatment
4. Contribution of ionizations and atomic displacements to the hardening of ion-irradiated polymers
5. Thermal stability of He irradiated photoresist films
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Flat end and Berkovich instrumented indentation of N and Si irradiated polyethylene – viscoelastic behavior, hardness and elastic modulus;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-04
2. The effects of nuclear and electronic stopping powers on ion irradiated novolac–diazoquinone films;Applied Surface Science;2004-04
3. Ion irradiation effects on hardness and elastic modulus in AZ 1350J™ photoresist film;Thin Solid Films;2002-05
4. Heavy ion (Xe and I) irradiation effects on photoresist films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-05
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