Author:
Kögler R.,Eichhorn F.,Mücklich A.,Reuther H.,Heera V.,Skorupa W.,Lindner J.K.N.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
7 articles.
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1. Tailoring of SiC nanoprecipitates formed in Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
2. The JANNUS Saclay facility: A new platform for materials irradiation, implantation and ion beam analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02
3. Application of multi-irradiation facilities;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2008-06
4. Scanning spreading resistance microscopy of defect engineered low dose SIMOX samples;Microelectronic Engineering;2007-03
5. Defect Engineering in Ion Beam Synthesis of SiC and SiO2 in Si;Solid State Phenomena;2005-12