Enhanced solid-phase growth of β-FeSi2 by pre-amorphization
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference6 articles.
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1. Surface morphology evolution of amorphous Fe–Si layers upon thermal annealing;Journal of Physics D: Applied Physics;2008-03-26
2. Enhanced interface mixing of Fe∕Si bilayers on preamorphized silicon substrates;Applied Physics Letters;2007-01-29
3. Auto-correlation function analysis of phase formation in iron ion-implanted amorphous silicon layers;Thin Solid Films;2004-08
4. Growth of Epitaxial β-FeSi2Thin Film on Si(001) by Metal-Organic Chemical Vapor Deposition;Japanese Journal of Applied Physics;2004-04-02
5. Strain Modulation of β-FeSi2 by Ge-Segregation in Solid-Phase Growth of [a-Si/a-FeSiGe]n Multi-Layer;MRS Proceedings;2003
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