In situ monitoring of hydrogen-surfactant effect during Ge growth on Si(001) using coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis-Reference-Cited by-同舟云学术

In situ monitoring of hydrogen-surfactant effect during Ge growth on Si(001) using coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis

Published:2000-03 Issue: Volume:161-163 Page:419-423
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Fujino Toshiaki,Fuse Takashi,Tazou Eisuke,Nakano Toshiaki,Inudzuka Katsuhiko,Goto Koji,Yamazaki Yujin,Katayama Mitsuhiro,Oura Kenjiro

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference22 articles.

1. Surfactants in epitaxial growth

2. Influence of surfactants in Ge and Si epitaxy on Si(001)

3. Local dimer exchange in surfactant-mediated epitaxial growth

4. Surfactant-mediated growth of Ge on Si(111)

5. Strain relief by microroughness in surfactant-mediated growth of Ge on Si(001)

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Hydrogen detection near surfaces and shallow interfaces with resonant nuclear reaction analysis;Surface Science Reports;2014-12

2. Transfer of Hydrogen Atoms and Site Exchange between Ge and Si Atoms during Germane Adsorption at Si (001);Shinku;2005

3. In Situ Monitoring of Surface Processes in a Gas Phase Atmosphere by Use of Ion Scattering and Recoiling Spectroscopy. Hydrogen-Surfactant Mediated Epitaxy of Ge on Si(001).;Hyomen Kagaku;2002

4. Hydrogen Segregation and Its Detrimental Effect in Epitaxial Growth of Ge Thin Film on Hydrogen-Terminated Si(001) Surface;Japanese Journal of Applied Physics;2001-11-01

5. Coaxial Impact-Collision Ion Scattering Spectroscopy and Time-of-Flight Elastic Recoil Detection Analysis for In Situ Monitoring of Surface Processes in Gas Phase Atmosphere;Japanese Journal of Applied Physics;2001-06-01