Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering-Reference-Cited by-同舟云学术

Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering

Published:2011-10 Issue:1-2 Volume:130 Page:147-153
ISSN:0254-0584
Container-title:Materials Chemistry and Physics
language:en
Short-container-title:Materials Chemistry and Physics

Author:

Roman Daiane,Bernardi Juliane,Amorim Cintia L.G. de,de Souza Fernando S.,Spinelli Almir,Giacomelli Cristiano,Figueroa Carlos A.,Baumvol Israel J.R.,Basso Rodrigo L.O.

Publisher

Elsevier BV

Subject

Condensed Matter Physics,General Materials Science

Reference34 articles.

1. Chemical vapour deposition of coatings

2. Magnetron sputtering: a review of recent developments and applications

3. State of the art in hard coatings for carbide cutting tools

4. Structure and electronic properties of zirconium and hafnium nitrides and oxynitrides

5. Characterization of Ti–Zr–N films deposited by cathodic vacuum arc with different substrate bias

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