Enhancement in piezoelectric responses of AlN thin films by co-addition of Mg and Ta
Author:
Funder
Murata Science Foundation
Kyushu University
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference23 articles.
1. Effect of MnO2 on the microstructure and electrical properties of 0.83Pb(Zr0.5Ti0.5)O3-0.11Pb(Zn1/3Nb2/3)O3-0.06Pb(Ni1/3Nb2/3)O3 piezoelectric ceramics;Li;Ceram. Int.,2020
2. The influence of A-site strontium ion in controlling the microstructure and electrical properties of P1−xSxZNZT ceramics;Zheng;J. Appl. Phys.,2016
3. Effect of Zr/Ti ratio on piezoelectric properties of Pb(Ni1/3Sb2/3)O3–Pb(ZrTi)O3 ceramics;Lonkar;Ceram. Int.,2011
4. Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering;Akiyama;Adv. Mater.,2009
5. High-throughput investigation of a lead-free AlN-based piezoelectric material, (Mg,Hf)xAl1–xN;Nguyen;ACS Comb. Sci.,2017
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4. Enhancing piezoelectric response in (002)-Oriented TaxAl(1−x)N films by magnetron-sputtering composition-tunable AlTa alloys;Journal of the European Ceramic Society;2023-11
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