Effect of oxygen pressure on GZO film as active layer of the TFT fabricated at room temperature-Reference-Cited by-同舟云学术

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Effect of oxygen pressure on GZO film as active layer of the TFT fabricated at room temperature

Published:2020-01 Issue: Volume:137 Page:106317
ISSN:0749-6036
Container-title:Superlattices and Microstructures
language:en
Short-container-title:Superlattices and Microstructures

Author:

Li Xiaoqing,Zhang Hongke,Lu Xubing,Fang Zhiqiang,Yao Rihui,Wang Yiping,Tao Hong,Liang Hongfu,Ning Honglong,Peng Junbiao

Funder

National Natural Science Foundation of China

National Key R&D Program of China

National Key Basic Research and Development Program of China

MOST

Guangdong Natural Science Foundation

Guangdong Science and Technology Project

Project for Guangdong Province Universities and Colleges Pearl River Scholar Funded Scheme

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference32 articles.

1. Integrated active-matrix capacitive sensor using a-IGZO TFTs for AMOLED;Chen;IEEE J. Electron Devices Soc.,2018

2. Review of recent developments in amorphous oxide semiconductor thin-film transistor devices;Park;Thin Solid Films,2012

3. LTPS thin-film transistors fabricated using new selective laser annealing system;Goto;IEEE Trans. Electron Devices,2018

4. Cross-linked poly(hydroxy imide) gate-insulating materials for low-temperature processing of organic thin-film transistors;Kim;J. Mater. Chem. C.,2018

5. Investigation of the electrical characteristics of bilayer ZnO/In2O3 thin-film transistors fabricated by solution processing;Lee;Materials,2018

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of Post-Annealing on the Properties of ZnO:Ga Films with High Transparency (94%) and Low Sheet Resistance (29 Ω/square);Materials;2023-09-28

2. Evolution of Frenkel defect pairs in β-Ga2O3 thin film with the introduction of oxygen and its application in GaN-based ultraviolet light-emitting diode;Journal of Luminescence;2023-09

3. Influence of oxygen on the optical, electrical, and heating properties of gallium-doped zinc oxide (GZO) films;AIP Advances;2023-02-01

4. The impact of oxygen on Ga doped ZnO film;RSC Advances;2023

5. Critical Effect of Oxygen Pressure in Pulsed Laser Deposition for Room Temperature and High Performance Amorphous In-Ga-Zn-O Thin Film Transistors;Nanomaterials;2022-12-07

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