InP patterning using contact mode and non-contact AFM lithography for quantum dot localization
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science
Reference8 articles.
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1. Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates;Semiconductor Science and Technology;2021-12-15
2. Deep and Alignment Free Patterned Etching of GaN Surface Using an Atomic Force Microscope;Journal of Nanoscience and Nanotechnology;2011-05-01
3. Focused ion beam modification of surfaces for directed self-assembly of InAs/GaAs(001) quantum dots;Nanotechnology;2007-10-10
4. III–V SEMICONDUCTOR SURFACE NANOPATTERNING USING ATOMIC FORCE MICROSCOPY FOR InAs QUANTUM DOT LOCALIZATION;International Journal of Nanoscience;2007-10
5. The influence of sample conductivity on local anodic oxidation by the tip of atomic force microscope;Journal of Applied Physics;2007-10
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