Deep and Alignment Free Patterned Etching of GaN Surface Using an Atomic Force Microscope
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Published:2011-05-01
Issue:5
Volume:11
Page:3979-3984
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ISSN:1533-4880
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Container-title:Journal of Nanoscience and Nanotechnology
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language:en
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Short-container-title:J. Nanosci. Nanotech.
Author:
Hwang Jih-Shang,Chen Der-Chang,Chen Li-Wei,Hu Zhan-Shuo,You Zen-Yu,Wu Chih-Chiang,Lin Tai-Yuan,Tsai Tsong-Ru,Chattopadhyay Surojit
Publisher
American Scientific Publishers
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering