Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121340
Reference19 articles.
1. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
2. Nanolithography on semiconductor surfaces under an etching solution
3. Modification of HF‐treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions
4. Fabrication of silicon nanostructures with a scanning tunneling microscope
5. Selective area oxidation of silicon with a scanning force microscope
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