Hydrogenated amorphous silicon nitride deposited by DC magnetron sputtering-Reference-Cited by-同舟云学术

Hydrogenated amorphous silicon nitride deposited by DC magnetron sputtering

Published:2006-10 Issue:4-6 Volume:40 Page:598-602
ISSN:0749-6036
Container-title:Superlattices and Microstructures
language:en
Short-container-title:Superlattices and Microstructures

Author:

Mokeddem K.,Aoucher M.,Smail T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference4 articles.

1. Optical dielectric function and infrared absorption of hydrogenated amorphous silicon nitride films: Experimental results and effective-medium-approximation analysis

2. Nitrogen-doping effects on electrical, optical, and structural properties in hydrogenated amorphous silicon

3. K. Mokeddem, M. Sayhi, M. Aoucher, A.C. Chami, M. Abdessalem, in: R.E. Sah, K.B. Sundaram, M.J. Deen, D. Landeer, W.D. Brown, D. Misra (Eds), Electrochemical Society Proceedings, vol. 2003–2, Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, 2003, p. 396

4. Physics of Semiconductor Devices;Sze,1981

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications;Materials;2021-09-28

2. New technique to synthesize silicon nitride nanopowder by discharge-assisted reaction of silane and ammonia;Materials Research Express;2021-08-01

3. Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiNx Thin Films;Coatings;2021-01-06

4. HiPIMS deposition of silicon nitride for solar cell application;Surface and Coatings Technology;2018-06

5. Computer analysis of microcrystalline silicon hetero-junction solar cell with lumerical FDTD/DEVICE;International Journal of Computational Materials Science and Engineering;2017-09