Author:
Li Gang,Han Xiaodong,Sun Wenjun,Cheng Yongjun,Li Detian
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. MEMS capacitive pressure sensors: a review on recent development and prospective;Eswaran;Int. J. Eng. Technol.,2013
2. Recent progress of miniature MEMS pressure sensors;Song;Micromachines,2020
3. Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer;Ganji;Solid State Electron.,2018
4. Jelodar Maryam Norouznejad, Ganji Bahram Azizollah. Design and analysis of a novel MEMS capacitive ttire pressure sensor with high sensitivity and linearity, Majlesi J. Telecommun. Devices, Vol. 5 Issue 2, p69-75. 7pp..2016.
5. Miniature and MEMS-type vacuum sensors and pumps;Anna;Vacuum,2009
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献