Design and simulation of an electrothermal micro-manipulator-Reference-Cited by-同舟云学术

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Design and simulation of an electrothermal micro-manipulator

Published:2021-12 Issue: Volume:18 Page:100179
ISSN:2665-9174
Container-title:Measurement: Sensors
language:en
Short-container-title:Measurement: Sensors

Author:

Alionte Cristian Gabriel,Rizescu Ciprian Ion,Rizescu Dana,Mureșanu Cosmin

Publisher

Elsevier BV

Subject

General Medicine

Reference21 articles.

1. Integrating MEMS and ICs;Fischer;Microsyst Nanoeng,2015

2. MEMS Materials and Processes Handbook;Ghodssi,2011

3. Influence of UV light irradiation on the corrosion behavior of electrodeposited Ni and Cu nanocrystalline foils;Deng;Sci. Rep.,2020

4. Future of micro-electromechanical systems (MEMS);Bao;Sensor. Actuator.: Physical Volume,1996

5. Nanoelectromechanical systems;Ekinci;Rev. Sci. Instrum.,2005

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