A reflectometer for at-wavelength characterisation of gratings
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference27 articles.
1. B. Loechel, A. Erko, St. Lemke, B. Nelles, M. Schmidt, F. Senf, Installation of a technological center for highly efficient optical gratings at Helmholtz–Zentrum Berlin (HZB), in: Proceedings of the SRI-12, Journal of Physics: Conference Series, 2012, 〈www.helmholtz-berlin.de/forschung/grossgeraete/nanometeroptik/technologiezentrum-optische-praezisionsgitter/index_en.html〉.
2. Sub-nm accuracy metrology for ultra-precise reflective X-ray optics
3. Characterization of the PTB EUV reflectometry facility for large EUVL optical components
4. High-accuracy EUV reflectometry at large optical components and oblique incidence
5. High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
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