Sub-nm accuracy metrology for ultra-precise reflective X-ray optics-Reference-Cited by-同舟云学术

Sub-nm accuracy metrology for ultra-precise reflective X-ray optics

Published:2011-04 Issue:1 Volume:635 Page:S52-S57
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Siewert F.,Buchheim J.,Zeschke T.,Brenner G.,Kapitzki S.,Tiedtke K.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference39 articles.

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2. Pencil Beam Interferometer For Aspherical Optical Surfaces

3. Design Of A Long Trace Surface Profiler

4. P. Takacs, S.N. Qian, Surface profiling interferometer, US Patent No. U4884697, December 5, 1989.

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