Efficient prediction of the quality factors of micromechanical resonators-Reference-Cited by-同舟云学术

Efficient prediction of the quality factors of micromechanical resonators

Published:2010-01 Issue:1 Volume:329 Page:84-95
ISSN:0022-460X
Container-title:Journal of Sound and Vibration
language:en
Short-container-title:Journal of Sound and Vibration

Author:

Choi Jinbok,Cho Maenghyo,Rhim Jaewook

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Acoustics and Ultrasonics,Condensed Matter Physics

Reference26 articles.

1. R. Abdolvand, G.K. Ho, A. Erbil, F. Ayazi, Thermoelastic damping in trench-refilled polysilicon resonators, In: Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 2005, pp. 324–327.

2. Internal friction in solids: I. Theory of internal friction in reeds;Zener;Physical Review,1937

3. Internal friction in solids: II. General theory of thermoelastic internal friction;Zener;Physical Review,1938

4. Thermoelastic damping in micro-and nanomechanical systems;Lifshitz;Physical Review B,2000

5. Thermoelastic damping in micro-beam resonators;Sun;International Journal of Solids and Structures,2006

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