Thermoelastic damping in micro- and nanomechanical systems
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.61.5600/fulltext
Reference24 articles.
1. Yoctocalorimetry: phonon counting in nanostructures
2. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
3. Dissipation measurements of vacuum-operated single-crystal silicon microresonators
4. Low-temperature anomalies in the dissipation of small mechanical resonators
5. Measurement of nanomechanical resonant structures in single-crystal silicon
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