Effects of hydrogen dilution of silane/methane gas mixtures on growth and structure of a-Si1−xCx:H alloys
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference25 articles.
1. Properties and structure ofa‐SiC:H for high‐efficiencya‐Si solar cell
2. Evidence for graphitic‐type bonding in glow discharge hydrogenated amorphous silicon carbon alloys
3. Preparation of highly photosensitive hydrogenated amorphous Si‐C alloys from a glow‐discharge plasma
4. Improvement of a-SiC:H alloys by hydrogen dilution of starting gases
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1. Influence of ZnSnO x barrier layer on the texturing of ZnO:Al layers for light management in flexible thin-film silicon solar cells;physica status solidi (a);2017-06-28
2. Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking;Journal of Physics D: Applied Physics;2015-06-16
3. Use of radio frequency power, silicon tetrafluoride and methane as parameters to tune structural properties of hydrogenated microcrystalline silicon carbon alloys;Journal of Physics D: Applied Physics;2014-10-27
4. Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD;physica status solidi (c);2014-10-10
5. Structural properties of hydrogenated microcrystalline silicon–carbon alloys deposited by Radio Frequency Plasma Enhanced Chemical Vapor Deposition: Effect of microcrystalline silicon seed layer and methane flow rate;Thin Solid Films;2014-01
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