Improvement of a-SiC:H alloys by hydrogen dilution of starting gases
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Hydrogen evolution from a-Si:C:H and a-Si:Ge:H alloys
2. Guiding principle for preparing highly photosensitive Si-based amorphous alloys
3. Structutral and electrical properties of silicon-based amorphous alloys
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Role of carbon content in tuning the physical quantities of a-Si1-xCx:H alloys deposited by PECVD;physica status solidi (c);2010-12-22
2. Study of structural and electronic environments of hydrogenated amorphous silicon carbonitride (a-SiCN:H) films deposited by hot wire chemical vapor deposition;Applied Surface Science;2008-06
3. Effect of H2 dilution on Cat-CVD a-SiC:H films;Thin Solid Films;2006-04
4. Optical, electrical and structural properties of hydrogenated amorphous Si-C alloys deposited by different hydrocarbon gas mixtures;Philosophical Magazine B;2000-04
5. Effect of hydrogen radicals on properties and structure of a-Si1−C :H films;Journal of Non-Crystalline Solids;1998-05
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