Theoretical considerations regarding pulsed CO2 laser annealing of silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference7 articles.
1. Annealing of phosphorus‐ion‐implanted silicon using a CO2laser
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3. Silicon Optical Constants in the Infrared
4. Free carrier absorption in silicon
5. Semiconductor Physics;Seeger,1973
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