Author:
Livengood Richard H.,Grumski Michael,Greenzweig Yuval,Liang Ted,Jamison Robert,Xie Qianghua
Cited by
12 articles.
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1. Focussed Helium Ion Beam Exposure of Polymethylmethacrylate: Positive or Negative Tone Images, Polyenes, and Fluorescent Carbon Layers;Advanced Engineering Materials;2023-03-28
2. Resists for Helium Ion Beam Lithography: Recent Advances;ACS Applied Electronic Materials;2020-11-24
3. Characterization of Surface Contaminants and Features;Developments in Surface Contamination and Cleaning, Volume 12;2019
4. References;Developments in Surface Contamination and Cleaning, Volume 12;2019
5. Interaction study of nitrogen ion beam with silicon;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-05